• Laboratory High Vacuum Magnetron Ion Sputtering Coater (DC, RF or DC+RF Options)
    Laboratory High Vacuum Magnetron Ion Sputtering Coater (DC, RF or DC+RF Options) Laboratory High Vacuum Magnetron Ion Sputtering Coater (DC, RF or DC+RF Options) Laboratory High Vacuum Magnetron Ion Sputtering Coater (DC, RF or DC+RF Options) Laboratory High Vacuum Magnetron Ion Sputtering Coater (DC, RF or DC+RF Options)

A High Vacuum Magnetron Ion Sputtering Coater is a thin-film deposition system that uses magnetron sputtering under high-vacuum conditions to coat substrates with metals, ceramics, semiconductors, or insulating materials. It provides stable, precise, and contamination-free coatings for research and industrial applications.  It is easy to operate and user friendly. Manual control version (cost-effective) is available for order. 


Key Features:

  • Magnetron Sputtering Principle: A target material (metal, ceramic, etc.) is bombarded with ions in a plasma. The atoms ejected from the target are deposited as a thin film on the substrate.
  • High Vacuum Environment: The chamber is evacuated to very low pressures (down to 5×10−4Pa), minimizing contamination and ensuring uniform film quality.
  • Ion Assistance: Ion bombardment improves adhesion and density of the deposited film.
  • Thickness monitor is available upon request (optional)
  • A vacuum Pump and one Chiller are included
  • DC/RF Power Options:
    • DC (Direct Current) – Used for conductive materials like metals.
    • RF (Radio Frequency) – Enables sputtering of non-conductive materials such as ceramics or polymers
    • DC + RF: combo of DC and RF


Typical Applications:

  • SEM/TEM Sample Preparation – Coating non-conductive samples with gold or carbon to prevent charging.
  • Thin-Film Research – Creating functional coatings for optics, electronics, and sensors.
  • Surface Engineering – Improving hardness, wear resistance, or conductivity of materials.
  • Nanotechnology – Fabricating nanoscale films for advanced devices.


Rotary Pump Speed50Hz: 16m3/h (4.4L/s); 60Hz: 19.2m3/h (5.2L/s)
Molecular Pump Speed300L/s
Ultimate Vacuum5x10-5Pa
Working Pressure0.5-5Pa
Vacuum Duration> 10 min (10^-3 Pa)
Vacuum MeasureMeasuring range from atmosphere to 10-6Pa
Gas ControlGas flow controller 
Chamber SizeΦ 260 x 200mm metal
Magnetron Target SourceTarget size 50 x 3mm
Target source: weak magnetic materials
Operation MethodTouch Screen
Weight100 Kg
Overall Size610 x 420 x 490 mm^3
Power SupplyAC 110V 60Hz (Standard) or 220V 50Hz
Power Consumption <3000W
Cooling MethodAir cooling (pump)+water cooling (sputtering target)
Vacuum Pump(Oil required) Rotary Vacuum Pump+(Oil free) Turbo Molecular Pump 
WarrantyOne year limited warranty with lifetime product support


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Laboratory High Vacuum Magnetron Ion Sputtering Coater (DC, RF or DC+RF Options)

  • $51,616.00


Available Options


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Tags: Semiconductor, Coating, UV Curing, Glovebox, Photolithography, Sputtering