A High Vacuum Magnetron Ion Sputtering Coater is a thin-film deposition system that uses magnetron sputtering under high-vacuum conditions to coat substrates with metals, ceramics, semiconductors, or insulating materials. It provides stable, precise, and contamination-free coatings for research and industrial applications. It is easy to operate and user friendly. Manual control version (cost-effective) is available for order.
Key Features:
- Magnetron Sputtering Principle: A target material (metal, ceramic, etc.) is bombarded with ions in a plasma. The atoms ejected from the target are deposited as a thin film on the substrate.
- High Vacuum Environment: The chamber is evacuated to very low pressures (down to 5×10−4Pa), minimizing contamination and ensuring uniform film quality.
- Ion Assistance: Ion bombardment improves adhesion and density of the deposited film.
- Thickness monitor is available upon request (optional)
- A vacuum Pump and one Chiller are included
- DC/RF Power Options:
- DC (Direct Current) – Used for conductive materials like metals.
- RF (Radio Frequency) – Enables sputtering of non-conductive materials such as ceramics or polymers
- DC + RF: combo of DC and RF
Typical Applications:
- SEM/TEM Sample Preparation – Coating non-conductive samples with gold or carbon to prevent charging.
- Thin-Film Research – Creating functional coatings for optics, electronics, and sensors.
- Surface Engineering – Improving hardness, wear resistance, or conductivity of materials.
- Nanotechnology – Fabricating nanoscale films for advanced devices.
| Rotary Pump Speed | 50Hz: 16m3/h (4.4L/s); 60Hz: 19.2m3/h (5.2L/s) |
| Molecular Pump Speed | 300L/s |
| Ultimate Vacuum | 5x10-5Pa |
| Working Pressure | 0.5-5Pa |
| Vacuum Duration | > 10 min (10^-3 Pa) |
| Vacuum Measure | Measuring range from atmosphere to 10-6Pa |
| Gas Control | Gas flow controller |
| Chamber Size | Φ 260 x 200mm metal |
| Magnetron Target Source | Target size 50 x 3mm Target source: weak magnetic materials |
| Operation Method | Touch Screen |
| Weight | 100 Kg |
| Overall Size | 610 x 420 x 490 mm^3 |
| Power Supply | AC 110V 60Hz (Standard) or 220V 50Hz |
| Power Consumption | <3000W |
| Cooling Method | Air cooling (pump)+water cooling (sputtering target) |
| Vacuum Pump | (Oil required) Rotary Vacuum Pump+(Oil free) Turbo Molecular Pump |
| Warranty | One year limited warranty with lifetime product support |
Laboratory High Vacuum Magnetron Ion Sputtering Coater (DC, RF or DC+RF Options)
- Brand: Aurora Pro Scientific
- Product Code: ASP-SD650MH
- Availability: Pre-Order
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$51,616.00
Available Options
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Tags: Semiconductor, Coating, UV Curing, Glovebox, Photolithography, Sputtering









