This compact laboratory programmable spin coater is designed to elevate thin-film deposition processes for both research laboratories and industrial applications. Its design features transparent upper cover with port, allowing users to observe the deposition process. The spin coater's speed is fully adjustable, spanning up to 8000 rpm, with 1 rpm resolution. This versatile spin coater comes with an oil-free vacuum pump and a vacuum chuck kit, accommodating wafer sizes ranging from 10 mm to 4 inches (100mm). With the coater's efficient vacuum system ensures excellent adhesion and uniformity for your coatings and minimize air pockets for superior film quality. If you have any questions, please feel free
Key Features:
- Large Substrate Compatibility: The Spin Coater is specifically engineered to handle 4-inch (100mm) substrates, offering a versatile platform for a wide range of coating applications.
- Practical Design Features: Anti-blockage spindle design for easy maintenance; the removable spin bowl is easy to be cleaned; Vacuum interlock function.
- Anodic oxidation Aluminum Shell: The durable construction ensures longevity and reliability in various laboratory settings.
- Intuitive large LCD screen: Experience user-friendly operation with the intuitive LCD interface. Effortlessly control and monitor the spin coating parameters, ensuring precision and repeatability in every application.
- Programmable Functionality: Tailor your coating processes to meet specific requirements using the coater's programmable functionality (Can program up to 5 recipes and 5 steps each recipe). Set spin speed (up to 8000 RPM), acceleration (100-5000 RPM/sec), coating curve and duration with ease, allowing for customized and optimized coating results.
- Chemical Compatibility: Removable spin bowl; Solvent resistant transparent lid; Chemical resistant spin bowl
- Accessories include: Vacuum chuck kit (10mm, 25mm and 55mm); 20 mL plastic syringe; Oil-free vacuum pump (diaphragm vacuum pump max. flow rate 66L/min) and other accessories (power cables, user manual, connection tubing and adapters)
- Dispensing Method: Manual dispensing, optional precision syringe pump available.
Typical Applications:
- Semiconductor Industry: Ideal for depositing thin films on semiconductor substrates, contributing to the manufacturing of electronic devices and integrated circuits.
- Solar Cell Development: Facilitates the coating of photoactive layers in solar cell fabrication, enhancing efficiency and performance.
- Optoelectronics: Supports the production of thin films for optical devices, including LEDs, lasers, and sensors.
- Microelectronics Research: Essential for research and development in microfabrication processes, ensuring precise and uniform coatings.
- Biosensor Platforms: Enables the deposition of thin films for biosensors, enhancing sensitivity and performance in diagnostic applications.
| Spin Coater | |
| Chamber Size | 135mm |
| Max Wafer Size | 4 inches (100mm) |
| Vacuum Chuck | 3 Pieces included (Diameter: 8 mm; 15mm; and 55mm) |
| Spin Speed | Speed: 0~8000rpm, Acceleration: 100~5000rpm/s |
| Spin Control | Programmable Control (5 modes) and Recipe Restore |
| Spin Control Resolution | 1rpm |
| Equipment Power | 110VAC/220VAC 50/60HZ, 150W |
| Equipment Dimension | 210mm×250mm×185mm |
Laboratory Programmable Compact Spin Coater EZ4C Including Oil-Free Vacuum Pump
- Brand: Aurora Pro Scientific
- Product Code: ASP-EZ4C
- Availability: In Stock
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$2,028.98
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Tags: Semiconductor, Coating, UV Curing, Glovebox, Photolithography, Peristaltic Pump




