• Laboratory  Programmable Compact Spin Coater EZ4S Model Including Oil-Free Vacuum Pump, 110/230VAC
    Laboratory  Programmable Compact Spin Coater EZ4S Model Including Oil-Free Vacuum Pump, 110/230VAC Laboratory  Programmable Compact Spin Coater EZ4S Model Including Oil-Free Vacuum Pump, 110/230VAC Laboratory  Programmable Compact Spin Coater EZ4S Model Including Oil-Free Vacuum Pump, 110/230VAC Laboratory  Programmable Compact Spin Coater EZ4S Model Including Oil-Free Vacuum Pump, 110/230VAC Laboratory  Programmable Compact Spin Coater EZ4S Model Including Oil-Free Vacuum Pump, 110/230VAC

This product is a cost-effective compact size vacuum spin coater designed for precise and uniform deposition of thin films and coatings.   The vibration-free and portable design makes it a versatile tool for either R&D or development uses.  For example, it can be installed in a glovebox or in a fume food.   It carries with a oil-free vacuum pump with low noises.  This spin coater can be used to deposit metal oxide thin films, polymer coatings and metal organic thin films. 

Key Features 

General Design Feature

  • 5 Spin programs with 5 steps for each program
  • Wafer size: 10 mm to 4'' (100 mm) 
  • Anodic oxidation aluminum shell 
  • Anti-blockage spindle design for easy maintenance
  • Easy to clean the spin bowl which is removable  

Safety and Reliability 

  • Compact size 
  • Vacuum interlock 
  • Hinged spin bowl lid design 

Chemical Compatibility 

  • Removable spin bowl 
  • Solvent resistant transparent lid
  • Chemical resistant spin bowl 

Programable Mode

  • Intuitive LCD screen 
  • Can program up to 5 recipes and 5 steps each recipe 

Typical Applications

  • Semiconductor process
  • Patterning,
  • Coating process
  • Photolithography 


Spin Coater
Chamber Size 135mm
Max Wafer Size 4 inches (100mm)
Vacuum Chuck 3 Pieces included (Diameter: 8 mm; 15mm; and 55mm)
Spin Speed 100-9999 RPM
Spin Control Programmable Control (5 modes) and Recipe Restore
Spin Control Resolution 1 RPM
Equipment Power 110-230VAC, 50/60Hz
Equipment Dimension 250 mm (L) x 210 mm(W) x 200 mm (H)

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Laboratory Programmable Compact Spin Coater EZ4S Model Including Oil-Free Vacuum Pump, 110/230VAC

  • $2,498.00
  • $2,372.00


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Tags: Semiconductor, Coating, UV Curing, Glovebox, Photolithography, Peristaltic Pump