• Laboratory Programmable Spin Coater EZ6S Model Including Oil-Free Vacuum Pump, 110/230VAC
    Laboratory Programmable Spin Coater EZ6S Model Including Oil-Free Vacuum Pump, 110/230VAC Laboratory Programmable Spin Coater EZ6S Model Including Oil-Free Vacuum Pump, 110/230VAC Laboratory Programmable Spin Coater EZ6S Model Including Oil-Free Vacuum Pump, 110/230VAC Laboratory Programmable Spin Coater EZ6S Model Including Oil-Free Vacuum Pump, 110/230VAC

This product is a cost-effective compact size vacuum spin coater designed for precise and uniform deposition of thin films and coatings.   The vibration-free and portable design makes it a versatile tool for either R&D or development uses.  For example, it can be installed in a glovebox or in a fume food.   It carries with a oil-free vacuum pump with low noises.  This spin coater can be used to deposit metal oxide thin films, polymer coatings and metal organic thin films.  It is suitable for 6'' wafer coating.  This spin coater carries 3 pieces of spin chucks (10mm, 25mm and 55mm) 


Key Features

Design features 

  • 4.3'' intuitive touchscreen interface 
  • Step by step operations with help function
  • Compact size and cane be placed in gloveboxes 
  • Oil-free vacuum pump included 

Chemical Compatibility 

  • Chemical resistant HDPE spin bowl
  • Stainless steel body 
  • Chemical resistant transparent spin lid 

Programmable Model 

  • Programmable spin coating process 
  • Vacuum interlock and spin lid interlock 
  • 10 Spin programs with 10 steps for each program
  • 100W BLDC motor and adjustable speed 100 to 120000 RPM

Typical Applications

  • Semiconductor process
  • Patterning,
  • Coating process
  • Photolithography
  • Glovebox


Spin Coater
Chamber Size 180 mm
Max Wafer Size 6 inches (150 mm)
Vacuum Chuck 3 pieces vacuum chuck included. Diameter: 10 mm, 25mm and 55mm
Spin Speed 100-12,000 RPM; 100-3,000 RPM/sec
Spin Control Programmable Control (10 modes and recipe restore)
Spin Control Resolution 1 RPM
Equipment Power 110-230VAC
Equipment Dimension 350 mm (L) x 256 mm (D) x 258 mm(H)

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Laboratory Programmable Spin Coater EZ6S Model Including Oil-Free Vacuum Pump, 110/230VAC

  • $5,386.00


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Tags: Semiconductor, Coating, UV Curing, Glovebox, Photolithography, Peristaltic Pump