This product is a cost-effective compact size vacuum spin coater designed for precise and uniform deposition of thin films and coatings.   The vibration-free and portable design makes it a versatile tool for either R&D or development uses.  For example, it can be installed in a glovebox or in a fume food.   It carries with a oil-free vacuum pump with low noises.  This spin coater can be used to deposit metal oxide thin films, polymer coatings and metal organic thin films.  It is suitable for 6'' wafer coating.  This spin coater carries 3 pieces of spin chucks (10mm, 25mm and 55mm) 

Key Features

Design features 

• 4.3'' intuitive touchscreen interface 
• Step by step operations with help function
• Compact size and cane be placed in gloveboxes 
• Oil-free vacuum pump included 

Chemical Compatibility 

• Chemical resistant HDPE spin bowl
• Stainless steel body 
• Chemical resistant transparent spin lid 

Programmable Model 

• Programmable spin coating process 
• Vacuum interlock and spin lid interlock 
• 10 Spin programs with 10 steps for each program

• 100W BLDC motor and adjustable speed 100 to 120000 RPM

Typical Applications

• Semiconductor process
• Patterning,
• Coating process
• Photolithography
• Glovebox