- Chamber volume: depending on the version, 1.7 to 2.6 liters
- Timer (digital or analog available)
- Gas supply
- Needle valves
- Mass flow controller (MFCs)
- Vacuum chambers
- Quartz glass (UHP) round with cover (approx. ∅ 105 mm, L 200 mm or L 300 mm)
- Borosilicate glass (UHP) round with cover (approx. ∅ 105 mm, L 200 mm or L 300 mm)
- W6 (approx. ∅ 160 mm, L 180mm)
- Frequencies:
- 40 kHz: power 0 - 100 W
- 13.56 MHz: power 0 - 200 W
- Additional options
- Spare parts kit, pressure gauge, corrosive gas design, gas bottles, pressure reducer
- Faraday cage, plasma polymerisation accessories, test inks, oxygen generator
- Low ventilation, slow pump-off, maintenance/service, documentation in local language
- Small batch production
- Analytics (SEM, TEM)
- Medical engineering
- Sterilizing
- Research and development
- Archaeology
- Textile technology
- Plastics technology
- Microfluidics
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Zepto Low Pressure Plasma System datasheet.pdf File Size 721.02KB |
Diener- Zepto (Low Cost / Low Budget) LOW-PRESSURE PLASMA SYSTEMS (PLASMA CLEANER)
- Brand: Diener Electronic
- Product Code: ASP-Zepto-M1
- Availability: 2-3 Days
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