IDT FS1012 & FS2012 Flow Sensors measure flow rate of gas or liquid using the thermo-transfer (calorimetric) principle. The flow sensor utilizes a series of MEMS thermocouples which provides excellent signal-to-noise ratio. The solid thermal isolation of the active MEMS sensing element along with the silicon-carbide film coating offers excellent abrasive wear resistance and long-term reliability. IDT offers an uncalibrated millivolt output version (FS1012) to the fully calibrated and linearized FS2012 for either gas or liquid with typical accuracy down to 2% of reading. The IDT Flow Sensors are ideal for use in the industrial process, healthcare and medical, and automotive markets.

Key Features

MEMES thermopile sensing
Silicon-carbide coating over MEMS flow sensor
Robust solid isolation technology
No cavity in MEMS element to cause clogging
Resistant to vibration and pressure shock
High accuracy and sensitivity
Fast response time
Food-grade compatible version
Easy cleaning and sterilization
3V - 5V DC Supply (5V for FS2012)

Typical Applications

Industrial Process

Process controls and monitoring
Oil and gas leak detection
HVAC and air-control systems
Liquid dispensing and metering systems

Healthcare and Medical
- Medical infusion pumps
- CPAP and respiratory devices
- Breathalyzer
- Oxygen concentrators
- Automotive
  - Mass air flow module
  - Diesel fuel flow
  - Brake fluid flow
  - Carbon air quality control

Model	FS2012-1001-LQ
Full Scale Flow	500 mL/min
Turndown Ratio	20:1
Accuracy	±2% Typical (±5% maximum)
Offset Stability	±0.045% Typical
Power Supply	5.5 VDC (maximum)
Current Draw	30 mA
Response Time	40 ms
Output	Analog 0-5 DVC; Digital with I²C
Maximum Pressure	10 Bar
Operating Temperature	0 – 85°C
Pins Out	6 pins
Calibration	Using distilled water at 20 °C and 1 atm
Wetted Material	Glass Fiber-reinforced PA 66 resin, epoxy and Silicon carbide
Dimensions	~ 52.8 x 24 x 7 mm
Weight	10 g
Storage Temperature	-50 ~ +130 °C, but avoid icing inside